磁控溅射制备(Pb_(1-x)Sr_x)TiO_3系铁电薄膜的实验研究  

Studies of (Pb_(1-x) Sr_x)TiO_3 Ferroelectric Thin Films Grown by Magnetron-sputtering

作　　者：孙平[1] 王茂祥[1] 孙彤[1] 舒庆[1] 

机构地区：[1]东南大学电子工程系,南京210096

出　　处：《真空科学与技术》2001年第4期326-328,共3页Vacuum Science and Technology

基　　金：国家自然科学基金资助项目 (No .6 96 710 0 8) ;光电技术及系统教育部重点实验室资助项目 (CETD0 0 0 9)

摘　　要：钛酸锶铅 ((Pb1 -xSrx)TiO3,PST)固溶体材料是一种性能优良的钙钛矿型铁电材料 ,其形成铁电相的温度较低 ,且易于和半导体工艺结合 ,应用潜力较大。本文采用磁控溅射法制备了PST薄膜 ,并初步研究了其介电和铁电特性。结果表明 ,磁控溅射得到的PST薄膜必须进行一定的热处理 ,才能使之转变为具有铁电性的钙钛矿结构的铁电薄膜。其介电特性与测试频率有关 ,试样的饱和极化强度可达 19μC cm2 ,剩余极化强度可达 6 6 μC cm2 ,矫顽场强达 16kV cm ,热释电系数达10 - 4 C m2 ·K量级 ,表明所制备的PST薄膜具有良好的铁电性。The (Pb 1- x Sr x )TiO 3 (PST) film is a kind of perovskite material with excellent dielectric and ferroelectric properties.The PST ferroelectric thin films were fabricated by magnetron sputtering,and their dielectric and ferroelectric characteristics were studied.The results showed that the PST thin films would possess the ferroelectric property after a certain heat treatment.The saturated polarization intensity,the residual polarization intensity and the coercive electric field of the PST samples can attain about 19 μC/cm 2 ,6 6 μ C/cm 2 and 16 kV/cm,respectively.The pyroelectric coefficient was in an order of 10 -4 C/m 2·K.The dielectric property of the PST thin films depended on the frequency measured.

关 键 词：钛酸锶铅 磁控溅射 介电特性 铁电特性 铁电薄膜 制备 

分 类 号：TM223[一般工业技术—材料科学与工程] O484[电气工程—电工理论与新技术]