低温共烧玻璃陶瓷基板烧结过程分析Ⅰ低温区有机物的分解及变化  

Sintering process analysis of low temperature cofired ceramics I Organics pyrolysis in low temperature phase

作　　者：韩振宇[1] 马莒生[1] 徐忠华[1] 唐祥云[1] 

机构地区：[1]清华大学材料科学与工程系,北京100084

出　　处：《功能材料》2001年第3期272-274,276,共4页Journal of Functional Materials

摘　　要：利用傅立叶红外谱仪（ＦＴＩＲ）对低温共烧玻璃陶瓷基板排胶过程中有机物的分解情况和分解产物进行了分析。利用ＴＧＡ、ＤＴＡ对基板吸热、放热和热失重情况进行了研究。结果表明：小分子有机物在室温阶段已挥发殆尽。高分子有机物ＰＶＢ在２００～３６０℃温度区间内发生侧链和主链的脱离和断裂，与空气反应生成 ＣＯ２、水蒸汽、丁醛等产物。由于 ＰＶＢ的分解，基板颗粒仅以几何方式堆积，基板没有机械强度。The pyrolysis and volatile products of organics in low temperature cofired substrate during low temperature was investigated by fourier transform infrared spectroscope (FTIR). The thermal effects of substrate was carried out by TGA and DTA. Results showed that the small molecular organics had volatiled below 100°C. The side-chain and C backbone of PVB began to breakdown during 200-360°C, and CO2, water, butyral, alcoholic compounds were formed. Because of the pyrolysis of PVB, the substrate had no strength and packed only by geometry method.

关 键 词：低温共烧陶瓷基板 聚乙燃醇缩丁醛 热分解 特征频率 微电子封装 

分 类 号：TN405[电子电信—微电子学与固体电子学]