耐高温多晶硅应变计  

Temperature-resistant polysilicon strain gauge

作　　者：孙凤玲[1] 田雷[1] 孙学智 王善慈[1] 

机构地区：[1]信息产业部电子第四十九研究所,黑龙江哈尔滨150001

出　　处：《传感器技术》2001年第3期21-23,共3页Journal of Transducer Technology

摘　　要：介绍了一种适用于特殊环境进行高温测量的多晶硅应变计的原理、设计、制作工艺及粘贴方法。它的特点是耐高温 (可用在温度达 2 5 0℃的环境中 )、体积小、安装方便。该种应变计已用于检测电站锅炉焊缝的牢固程度 。Polysilicon strain gauge being applied to special environment is introduced,including principle,design,manufacture technology and bonding method.It features in resistance to high temperature up to 250?℃, small volume and expedient installation.The strain gauge has been used to inspect slot weld of boiler in power station, the performance is better in practical application.

关 键 词：多晶硅 应变计 粘接 传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]