SOI及GeSi/Si脊形光波导的模式与波导几何结构  

Geometric Structures and Modes of SOI and GeSi/Si Rib Opticl Waveguides

作　　者：魏红振[1] 余金中[1] 张小峰[1] 韩伟华[1] 刘忠立[1] 王启明[1] 史伟[2] 房昌水[2] 

机构地区：[1]中国科学院半导体研究所集成光电子实验室,北京100083 [2]山东大学晶体材料国家重点实验室,济南250100

出　　处：《光学学报》2001年第5期556-558,共3页Acta Optica Sinica

基　　金：国家自然科学基金! (6 9896 2 6 0;6 9990 5 40 )资助项目

摘　　要：用有效折射率方法对SOI(绝缘体上硅 )及GeSi Si脊形光波导的单模条件进行了模拟 ,与Soref的单模条件进行了比较 ,将两者与实验结果进行了比较 ,得到了与实验结果符合得非常好的单模条件。同时对多模波导进行了模拟 。Comparsions of single mode waveguide conditions for single mode silicon on insulator (SOI) and GeSi/Si rib waveguides obtained by the effective index method (EIM) and proposed by Soref et al. with the experimental result are carried out. It is found that single mode waveguide condition obtained by effective index method is in good agreement with Rickman′s experimental result. Conditions for multimode rib waveguides loading the first and the second order mode are also obtained by effective index method.

关 键 词：集成光学 脊形光波导 SOI GESI/SI 模式 几何结构 

分 类 号：TN256[电子电信—物理电子学]