微机械三维结构几何尺寸的图像测量  

An Industrially Efficient Method for Measuring Precisely 3D Microstructure of MEMS

作　　者：苑伟政[1] 王小伟[1] 马炳和[1] 

机构地区：[1]西北工业大学微/纳米系统实验室,陕西西安710072

出　　处：《西北工业大学学报》2001年第4期493-497,共5页Journal of Northwestern Polytechnical University

基　　金：国防基础研究基金 (J170 0 A0 0 1);陕西省自然科学基金 (97C0 4)

摘　　要：针对微机械三维几何尺寸测量问题 ,提出了基于 CCD光电测量技术的图像测量方法 ,并结合硅微悬臂梁深度和平面尺寸进行了实验研究 ,其结果可适用类似的三维结构测量。Micro-electro-mechanical system (MEMS), an important branch of micro and nano technology, is developed very rapidly. To our best knowledge, there is as yet no industrially efficient method for measuring precisely its 3D microstructure probably because of its weak strength and its fragile and complicated structure in a highly restrictive micro dimension area. We propose image measurement method, the result of over a year of development work, to fill the need for an industrially efficient and precise measurement method. The hardware of our experimental system consisted of five modules: light image, signal treatment, digital image treatment, output of results, and mechanical support and judgment. We developed software to determine the relationship between luminousity of measured surface and gray of relevant image. Using both hardware and software, we obtained depth of silicon micro cantilever beam with a relative error of 1%. For determining planar size, we used the same hardware but, for implementing perspective projection imaging theory, different software in the form of new algorithms including Wavelet, Kernel, Soble and Fractal; thus we obtained planar size with a relative error of less than 2%. Other measurement methods are useful in laboratory but not suitable for industrial use. Our proposed image measurement method, when put to industrial use, can still give the same accuracy and reliability as obtainable with other methods only in the laboratory. Moreover, compared with these laboratory methods, our method is more flexible in measuring purpose, wider in measuring range, and more convenient.

关 键 词：微机械 几何尺寸 图像测量 三维结构 微加速度计 悬臂梁 

分 类 号：TH824.4[机械工程—仪器科学与技术] TG8[机械工程—精密仪器及机械]