反渗透法制取电子级超纯水工艺的改进  

IMPROVEMENT OF RO PROCESS FOR PREPARING THE ELECTROMIC-LEVEL ULTRA-PURE WATER

作　　者：胡伟林[1] 

机构地区：[1]华越微电子有限公司,浙江绍兴312000

出　　处：《水处理技术》2001年第5期296-299,共4页Technology of Water Treatment

摘　　要：在现代大型微电子工业用超纯水系统中二级反渗透 + N2 配合真空膜脱气 +三级混床的工艺属当今最新开发的工艺 ,在大型系统中应用很少 ,我们通过三年多的不断摸索、实践和优化改进 ,最终将该套具有技术先进、投资少、结构紧凑、出水量大、品质高等特点的水系统很成功地稳定运行 ,解决了工艺流程中的缺陷和不足 。The technical process of two-stage RO+vacuum membrane degasifying +three-stage mixed bed, the newest developing technical process nowaydays for preparing ultra-pure water, has been less applied in large-scale system. Through optimization and improvement, the author developed the system, which possesses the advantages of advanced technique,less investment, compact structure, great output and high quality; it has operated successfully and stably to solv some shortcomings and better control the operating cost.

关 键 词：反渗透 真空膜脱气 混床 电子级 超纯水 工艺改进 电子工业用水 

分 类 号：TQ028.8[化学工程] TN04[电子电信—物理电子学]