微机械陀螺仪的微结构分析与设计  

Analysis and Design of Microstructure for Microgyroscope

作　　者：贾建援[1] 王志荣[1] 冯小平[2] 

机构地区：[1]西安电子科技大学机电工程学院,西安710071 [2]西安电子科技大学电子工程学院,西安710071

出　　处：《仪器仪表学报》2001年第5期512-515,共4页Chinese Journal of Scientific Instrument

摘　　要：针对基于微米技术的微机械陀螺检测功能微弱的现象 ,本文建立了振动轮式微机械陀螺仪的机电系统动力学模型。经对某微陀螺结构的仿真计算发现 ,哥氏阻尼力随激励哥氏力增大而增大 ,造成电容检测信号极为微弱 ,无论激励的幅度和频率如何。为此 ,本文给出了一种新型振动轮式微陀螺结构 ,可减小哥氏阻尼力 ,相对增大了激励哥氏力。这种新型结构显著增强了电容检测信号 ,而且具有双轴微陀螺功能、对耦合线加速度不敏感等特点。Aiming at the weak detecting function of microgyroscope based on micron-tech, this paper establishes the general microelectromechanical system dynamics models of the vibrating wheel oscillator microgyroscope (VWOG). After simulating and calculating a certain microgyroscope structure, we discover that the Coriolis-damp-force increases with the increase of the Coriolisexciting-force. For this, whatever the amplitude and frequency of the exciting vibration are, the capacitor detecting signals remain very weak. Therefore, this paper advances a new VWOG structure, which can decrease the Coriolis-damp-force and increase the Coriolis-exciting-force relatively. This new-style VWOG structure strengthens the detecting signals of the capacitor remarkably, possesses two-axis microgyroscope function, and shows insensitive to the coupling line acceleration.

关 键 词：微机械陀螺仪 微电子机械系统 微惯量测量组合 机电系统动力学 微结构设计 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计]