MEMS光开关  

Fabrication of MEMS Optical Switches

作　　者：梁春广[1] 徐永青[1] 杨拥军[1] 

机构地区：[1]信息产业部电子第十三研究所,石家庄050051

出　　处：《Journal of Semiconductors》2001年第12期1551-1556,共6页半导体学报（英文版）

基　　金：国家八六三光电子主题;国家集成光电子联合重点实验室资助项目~~

摘　　要：采用 MEMS体硅工艺 ,制作了三种结构的微机械光开关 :水平驱动 2 D(二维 )光开关、垂直驱动 2 D光开关和扭摆驱动 2 D、3D(三维 )光开关 .水平驱动光开关采用单层体硅结构 ,另外两种光开关都采用了硅 -玻璃的键合结构 .它们的工作原理都基于硅数字微镜技术 .这三种光开关均采用了静电力驱动 ,具有较低的驱动电压 ,其中扭摆式光开关的驱动电压小于 15 V.对于 2 D开关阵列 ,在硅基上制作了光纤自对准耦合槽 .对后两种光开关的开关特性进行了计算机模拟与分析 ,结果表明这两种光开关具有小于Three kinds of MEMS optical switches with different mechanical structures are produced by the bulk micromachining processes.The first is 2D optical switch with horizontal actuator,the second is 2D optical switch with vertical actuator,and the third is 2D?3D optical switch with wiggly actuator.The first is formed with monolayer bulk silicon structure,the others use the silicon on glass bonding structures.Their principles of operation are all based on silicon digital micromirrors technology.The electrostatic actuators with low driving voltage are used in the three kinds of optical switch.The actuation voltages for the third kinds of optical switch are less than 15V.The grooves used for optical fibers being self aligned coupling are made on silicon substrate for the 2D switch arrays device.Computer simulation and analysis of on off characteristic show that the second and the third optical switches have switching time less than 1ms.

关 键 词：微机械电子系统 光开关 硅-玻璃键合 光通信 

分 类 号：TN253[电子电信—物理电子学]