可编程序控制器在真空镀膜机上的应用  

Application of PLC Vacuum Membrane Plate Machine

作　　者：刘雁[1] 孙金洲[2] 

机构地区：[1]沈阳大学建筑工程学院,辽宁沈阳110044 [2]沈阳电视台,辽宁沈阳110032

出　　处：《沈阳大学学报》2001年第2期64-66,71,共4页

摘　　要：文中介绍采用可编程序控制器改进单机单片磁控溅射真空镀膜机的设计和运行情况。本系统可以连续工作，每次可镀三十片玻璃，并可镀复合膜多达三层，比以前单机单片镀膜工艺显著提高了工作效率，降低了成本，改善了产品质量。The design and running state which PLC improved magnetic - control vacuum membrane plate machine has been introduced. This system can work continuously, plate 30 pieces of glasses every time and can reach three layers and over. It raised efficiency of membrane plate more than plate technique of single chip computer before, reduced costs and improved the good quality.

关 键 词：可编程序控制器 磁控溅射法 真空镀膜机 应用 镀膜玻璃 单机单片镀膜工艺 改进 

分 类 号：TQ171.724[化学工程—玻璃工业] TM571.61[化学工程—硅酸盐工业]