精密六自由度平面悬浮平台悬浮位置控制（英文）  

Levitation position control of a precise 6-DOF Planar magnetic Levitation stage

作　　者：周振雄 王洪希 刘丙申 王文保 Zhen-xiong ZHOU;Hong-xi WANG;Bing-shen LIU;Wen-bao WANG(School of Electrical and Informational Engineering,Beihua University,Jilin 132013,China)

机构地区：[1]北华大学电气与信息工程学院,吉林吉林132013

出　　处：《机床与液压》2018年第24期125-131,共7页Machine Tool & Hydraulics

基　　金：National Natural Science Foundation of China(60772005);Jilin provincial education department(JJKH20180342KJ,2012153);Jilin Provincial Development and Reform Commission Project(2019)~~

摘　　要：介绍了一种由三套悬浮线圈悬挂的精密六自由度平面磁悬浮平台。针对具有非线性和强耦合系统的平面磁悬浮平台的悬浮系统,提出了一种改进的二阶自抗扰控制器(ADRC)。该控制器不仅能对内部干扰和外界干扰进行观测和补偿,而且克服了常规ADRC的非线性状态误差反馈中非线性函数的粗糙性。仿真和实验结果表明:采用改进的二阶自抗扰控制方案,平面悬浮级悬浮高度控制系统具有较好的鲁棒性、动静态性能。A novel precise 6-DOF Planar magnetic Levitation platform has been introduced in this paper,which is suspended through three sets of Levitation coil.To aim directly at the Levitation system of the planar magnetic Levitation stage which is a nonlinear and strong coupling system,a modified second-order auto-disturbance rejection controller (ADRC)is proposed.This controller not only observes and compensates the inner disturbance and outside disturbance,but also overcomes the rough character of non-linear function in nonlinear state error feedback of conventional ADRC.The result of simulation and experiment indicate the Levitation altitude control system of the Planar Magnetic Levitation Stage has better robustness,dynamic and static performance by using modified second-order auto-disturbance rejection control scheme.

关 键 词：磁悬浮 自抗扰 位置控制 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]