隔膜式压电驱动器的制备及其在微泵中的应用  

Preparation of the Spacer Film Piezoelectric Actuator and Its Application in the Micro-Pump

作　　者：张成功 李以贵 王欢 Zhang Chenggong;Li Yigui;Wang Huan(College of Science,Shanghai Institute of Technology,Shanghai 201418,China)

机构地区：[1]上海应用技术大学理学院

出　　处：《微纳电子技术》2019年第2期145-150,156,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(60777016);上海市联盟计划资助项目(LM201712)

摘　　要：利用块材钛酸锆铅(PZT)材料的逆压电效应设计并制备了可用于微泵驱动的压电驱动器,通过5种结构模型的仿真分析确定了压电驱动器的隔膜式结构,在获取较大中心位移的同时有效提高了结构强度,增加了驱动器的适用性。工艺上通过键合、减薄、激光烧蚀及硅的湿法刻蚀工艺完成了器件的制备,施加频率10 Hz和100 Hz的交变信号测出了中心膜片位移与对应电压的关系,施加峰峰值为1 V的信号测得共振频率为70 kHz。基于制备的压电驱动器设计并制备了机械式带止回阀的微泵,经测试泵入、泵出功能正常。当对微泵外加峰峰值为30 V、频率为500 Hz的驱动电压信号时,每分钟能驱动的液体流量为55μL。该驱动器的驱动效果好,可进一步结合不同的微阀设计制备性能更加优良的微泵。A piezoelectric actuator that can be used for micro-pump driving was designed and fabricated by the inverse piezoelectric effect of the bulk zirconate titanate(PZT)material.The spacer film structure of the piezoelectric actuator was determined by the simulation analysis of five kinds of structural models.While obtaining a large center displacement,the structural strength was effectively improved,and the applicability of the actuator was increased.The actuator was fabricated by bonding,thinning,laser ablation and silicon wet etching process.The alternating signals with the frequency of 10 Hz and 100 Hz were applied to measure the relationship between the displacement of the central diaphragm and the corresponding voltage.Besides,a resonant frequency of 70 kHz was measured by applying a signal with a peak-to-peak value of 1 V.Based on the prepared piezoelectric actuator,a mechanical micro-pump with a check valve was designed and fabricated,and the pumping function of the micro-pump was tested normally.When a driving voltage signal with a peak-to-peak value of 30 V and a frequency of 500 Hz was applied to the micro-pump,the flow of the liquid that could be driven per minute was 55μL.The actuator has a good driving effect,and can be combined with different micro-valve designs to prepare a micropump with better performances.

关 键 词：块材钛酸锆铅(PZT) 压电驱动器 微泵 微加工技术 微电子机械系统(MEMS) 

分 类 号：TH137[机械工程—机械制造及自动化] TH703