多弧离子镀沉积氮化钛铝超硬膜的研究  

Study on (Ti,Al)N film deposited by multi-arc ion plating

作　　者：赵军[1] 田野[1] 于文馨[1] 王希囡[1] 

机构地区：[1]沈阳大学,辽宁沈阳110044

出　　处：《真空》2002年第1期8-10,共3页Vacuum

摘　　要：采用多弧离子镀技术沉积氮化钛铝超硬反应膜。考查了沉积工艺参数对膜层组织表面形态的影响 ,进行了显微硬度测定分析及膜层耐磨性实验 ,确定了氮化钛铝超硬反应膜的最佳沉积工艺。Ti,Al)N super hard films were deposited by multi arc ion plating. The influences of process parameters on the surface morphology of the (Ti,Al)N super hard films are studied. The micro hardness analysis was carried out. And the anti friction property was also tested. The best deposition process was determined to deposit the (Ti,Al)N super hard films.

关 键 词：多弧离子镀 氮化钛铝超硬反应膜 膜层组织 硬度 金属材料 表面处理 物理气相沉积 

分 类 号：TG174.45[金属学及工艺—金属表面处理]