压电微马达研究进展  

Reserch and Development of the Piezoelectric Micromotor

作　　者：阎立[1] 褚祥诚[1] 董蜀湘[1] 李龙土[1] 

机构地区：[1]清华大学材料科学与工程系

出　　处：《压电与声光》2002年第2期116-121,共6页Piezoelectrics & Acoustooptics

摘　　要：利用网络和图书馆对国际上 1996年至今的压电微马达研究进展进行了调研。分别介绍了压电薄膜、陶瓷的行波、驻波类微马达的最新研究情况 ,同时也对一种具有与压电微马达特性相同的静电超声微马达的研究作了说明 。In order to obtain the development of piezoelectric micromotors in the world recently,I have searched the papers and researches on the topics of the piezoelectric micromotors published since 1996 with the internet tools and library.This paper reviews the novel researches on the piezoelectric film and ceramic block micromotors using traveling and standing wave,and also introduce the electrostatic micromotor with the same characteristics as piezoelectric motors.At the end the principle of the piezoelectric ceramic traveling wave micromotor in our lab will be presented.

关 键 词：压电微马达 压电薄膜 静电超声微马达 

分 类 号：TM38[电气工程—电机]