液相电沉积类金刚石薄膜的相关物理化学问题  

Aroused Problems in the Deposition of Diamond-like Carbon Films by Using the Liquid Phase Electrodeposition Technique

作　　者：酒金婷[1] 付强[2] 汪浩[2] 朱鹤孙[2] 

机构地区：[1]北京服装学院材料工程系,北京100029 [2]北京理工大学材料中心,北京100081

出　　处：《无机材料学报》2002年第3期571-578,共8页Journal of Inorganic Materials

基　　金：国家自然科学基金(59882001)

摘　　要：利用液相电沉积技术制备了含氢类金刚石薄膜(ＤＬＣ);讨论了应用电位和沉积碳源对沉积过程和薄膜结构的影响;结果表明有高介电常数、低粘度、分子中甲基基团直接与极性基团键合的有机液体是合适的沉积碳源;通过增加沉积电位将有利于薄膜中ｓｐ３碳的生长;最后,作者提出了液相沉积类金刚石薄膜的反应机理－极化－反应机制,在电场的作用下,有机分子被极化并在电极表面反应生成ＤＬＣ薄膜和其他产物．Hydrogenated diamond-like carbon (DLC) films were prepared by using a liquid phase electrodeposition technique. The effect of applied potential and carbon sources on the deposition process and film structures were studied. The results show that the organic liquids with high dielectric constants, small viscosities and the methyl group bonding to the polar group are appropriate carbon sources. The increasing potential can improve the formation of sp(3) carbon during the deposition process. In a high electric field, organic molecules are polarized and react on the surface of the electrode, turning into DLC and other products. The authors believed that the reaction follows a polarization-reaction mechanism.

关 键 词：液相电沉积 类金刚石薄膜 物理化学 DLC薄膜 碳源 反应机理 结构 

分 类 号：O484[理学—固体物理] O613.71[理学—物理]