直角坐标和极坐标系一体的激光直写设备(英文)  

LASER DIRECT WRITING SYSTEM WITH CARTESIAN AND POLAR COORDINATE

作　　者：李凤友[1] 卢振武[1] 谢永军[1] 张殿文[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所

出　　处：《光子学报》2002年第5期616-619,共4页Acta Photonica Sinica

基　　金：National Natural Science Foundation( 6 0 0 780 0 6 )

摘　　要：介绍了具有直角坐标和极坐标写入系统的激光直写设备 。Laser Direct Writing System(LDWS),which is mainly composed of Cartesian and polar coordinate systems,is introduced here and its photolithographic characteristics for fabricating the diffractive optical elements (DOE′s) are presented.The fabrication techniques by applying the laser direct writing are developed.Experimental results have been obtained by using LDWS.

关 键 词：直角坐标 极坐标 激光直写设备 衍射光学元件 计算全息图 光刻 写入系统 

分 类 号：TP333.4[自动化与计算机技术—计算机系统结构] TH74[自动化与计算机技术—计算机科学与技术]