用SiC薄膜作防氚渗透阻挡层的研究  

RESEARCH ON SIC FILM AS TRITIUM PERMEATION BARRIER

作　　者：姚振宇[1] 严辉[2] 谭利文[2] 韩华[1] 

机构地区：[1]中国原子能科学研究院,北京102413 [2]北京工业大学,北京100022

出　　处：《核聚变与等离子体物理》2002年第2期65-70,共6页Nuclear Fusion and Plasma Physics

基　　金：国家"八六三"计划混合堆资助项目 (86 3- 6 14- 0 3- 0 3- 11) ;北京市自然科学基金资助项目 (2 992 0 0 2 )

摘　　要：采用分步偏压辅助射频溅射法在 316L不锈钢表面制备SiC薄膜 ,作为聚变堆第一壁及包层结构材料的氚渗透阻挡层。扫描电镜观察表明 ,制备的膜致密、均匀 ,且与基体结合牢固。X射线衍射分析表明 ,膜具有(111)面择优取向的 β SiC微晶结构。傅里叶变换红外光谱分析发现 ,对应于 β SiC的Si C键存在伸缩振动吸收峰。采用中间复合过渡层技术 ,可以提高SiC膜与不锈钢基体的结合强度。测量了 5 0 0℃时带有SiC膜的 316L不锈钢的氚渗透率 ,与表面镀钯膜的 316L相比 ,氚渗透率减低因子 (PRF)值达到 10 4 以上。溅射时衬底偏压和射频功率要影响膜的结构 ,从而影响PRF值。根据分析结果 ,从不同的膜制备工艺中初步筛选出了合适工艺。SiC film has been coated on surface of 316L stainless steel,using substrate bias assisted radio frequency (RF) sputtering, as tritium permeation barrier (TPB) of first wall and blanket in fusion reactor.The microstructure of films was examined by SEM,XRD and FTIR.Results show that the film is compact,uniform and has good adherence with the substratum.The crystalline structure of the film is a microcrystalline cubic phase β SiC and shows (111) preferred direction,the absorption peak corresponds to the stretch frequency peak of Si C bond of β SiC.A multiple transition layer (Ti and TiN) was deposited on stainless steel before depositing SiC film,and resulted in significant improving adhesion of SiC film to stainless steel.The tritium permeation reduction factor (PRF) of 316L with film evaluated at 500℃ is up by a factor of 10 4,compared with 316L with Pd film.Its found that bias voltage and RF power influence the quality of film and PRF.Appropriate technology has been selected through the preparation technologies.

关 键 词：SIC薄膜 防氚渗透阻挡层 碳化碳膜 射频溅射 聚变堆 制备工艺 

分 类 号：TL621[核科学技术—核技术及应用] O484.1[理学—固体物理]