力学探针两步压入法研究(Ti,Al)N/AlN纳米多层膜的超硬效应  

Studies on the Superhardness Effect of (Ti,Al)N/AlN Nano-scale Multilayers by Two-step Penetration Method Using the Microindentation Technique

作　　者：田家万[1] 韩增虎[1] 虞晓江[1] 赖倩茜[1] 李戈扬[1] 

机构地区：[1]上海交通大学金属基复合材料国家重点实验室,上海200030

出　　处：《材料工程》2002年第6期10-13,共4页Journal of Materials Engineering

摘　　要：提出了采用毫牛力学探针技术对硬质薄膜的硬度和弹性模量等力学性能进行准确测量的两步压入法 ,并用此方法研究了 (Ti,Al) N/ Al N纳米多层膜的硬度和调制周期之间的关系。结果表明 ,该纳米多层膜体系的硬度和弹性模量随调制周期的减小单调增加 ,并在调制周期为 1.3nm时达到最高值 HV=2 9.0 GPa和 E=383.0 GPa,表明 (Ti,Al) N/ Al N纳米多层膜存在超硬度和超模量效应。A two step penetration method using the microindentation technique was presented to investigate the hardness and elastic modulus of thin films in this paper, and the method was used to evaluate the relationship of hardness, elastic modulus and modulation period of (Ti,Al)N/AlN multilayers The results show that hardness and elastic modulus of the multilayers increase monotonously as the period decrease The maximum value of HV=29 0GPa and E=383 0GPa, respectively, is reached at the period 1 3nm, Which demonstrates that there exist superhardness and supermodulus effects in the (Ti,Al)N/AlN multilayers

关 键 词：力学探针 N/AlN纳米多层膜 两步压入法 超硬效应 力学性能 硬度 氮 氮化铝 测量 

分 类 号：O484.5[理学—固体物理]