双频激光远程直线度/同轴度测量系统  

Long Range Straightness/Coaxiality Measurement System Using Dual-frequency Laser

作　　者：陈强华[1] 吴健[1] 殷纯永[1] 

机构地区：[1]清华大学精密仪器与机械学系

出　　处：《中国激光》2002年第7期625-630,共6页Chinese Journal of Lasers

基　　金：国家自然科学基金 (批准号 :5 9735 12 0 )

摘　　要：介绍了一种基于横向塞曼双频激光的直线度 同轴度测量系统 ,与纵向塞曼系统相比 ,舍去了 1 4波片 ,减小了仪器尺寸 ,从原理上消除了由于 1 4波片相位延迟不是严格 90°造成的非线性误差 ;符合共路原则 ,对空气扰动有较强的抑制力 ;具有自适应性 ;信号处理采用比相技术 ,测量精度可以达到 0 .1° ;测量元件可以暂时移出光路 ,挡光后数据能够自动恢复 ;80 98单片机系统智能化稳定的频差在 10h内变化量小于 0 5kHz ;系统稳定性为 2 μm h ;示值线性相关系数优于 0 9999;In this paper, a novel straightness/coaxiality measurement system using transversal Zeeman dual frequency laser is introduced. In contrast to longitudinal Zeeman system, the size of instrument is shortened and the non linearity error generated from quarter wave plate is avoided. The system is self adaptive and quite resistant to air turbulence. Phase measurement can reach 0.1 degree equivalent to 1 μm. Measuring component can be removed from light path during measuring process. Using 8098 singlechip computer to stabilize the beat frequency intelligently, experiment has shown that the change of beat frequency is less than 0.5 kHz in 10 hours. The measuring stability is about 2 μm/h. Correlation coefficient of linearity of indicating value is better than 0 9999. It realizes the straightness/coaxiality measurement of long range.

关 键 词：双频激光 直线度 同轴度 测量 横向塞曼 长距离测量 几何量计量 

分 类 号：TN249[电子电信—物理电子学]