圆光栅偏心对仿真转台角位置精度的影响  

Effect of Eccentric of Circular Gratings on Angular Position Accuracy of Simulator

作　　者：糜小涛[1] 高胜英[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,长春130033

出　　处：《长春理工大学学报（自然科学版）》2014年第3期9-12,共4页Journal of Changchun University of Science and Technology(Natural Science Edition)

摘　　要：为了满足仿真转台角位置精度的指标要求,减小圆光栅安装偏心引起的角位置误差,本文提出了运用最小二乘拟合对该误差进行修正的方法。首先介绍了仿真转台的工作原理并给出了角位置精度的技术指标,然后理论分析了圆光栅安装偏心引起的测角误差与转角的规律,运用最小二乘拟合对测角误差进行修正。通过对比,修正后的测角误差明显小于修正前。结果表明,最小二乘拟合方法能够有效地修正圆光栅安装偏心带来较大的测角误差,使得角位置测量精度满足±4"指标要求。In order to meet the index requirements of angular position accuracy of simulator and reduce the angular po-sition error that was caused by the installation eccentric of circular gratings. In this paper, the least-squares fitting method to correct this error was proposed . Firstly, the working principle of simulator is introduced and the technical indicators of angular position accuracy were given. Then, the law between angle-measurement error and the angle was analyzed, which was caused by the installation eccentric of circular gratings. Using the least-squares fitting, the an-gle-measurement error was corrected. Finally, the angle-measurement errors of before and after were measured and contrasted. By being contrasted, the angle-measurement error of after correction was significantly less than that of be-fore. The results show that the least-squares fitting method can effectively correct the angle-measurement error, which is caused by the installation eccentric of circular gratings, and the corrected angular position accuracy can meet the in-dex requirements of ±4″.

关 键 词：仿真转台 圆光栅 测角误差 误差修正 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]