基于集成温度传感器的硅微陀螺仪数字化温度补偿研究  

Research on Digital Temperature Compensation of Silicon Micro Gyroscope Based on Integrated Temperature Sensor

作　　者：柳小军[1,2] 杨波[2,3] 袁安富[1] 赵辉[2,4] 王行军[2,3] 

机构地区：[1]南京信息工程大学信息与控制学院,南京210044 [2]东南大学仪器科学与工程学院,南京210096 [3]东南大学微惯性仪表与先进导航技术教育部重点实验室,南京210096 [4]南京理工大学自动化学院,南京210094

出　　处：《传感技术学报》2014年第6期770-774,共5页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(61104217;U1230114)

摘　　要：提出了一种基于集成温度传感器的硅微陀螺仪数字化温度补偿方法。首先,介绍了集成温度传感器的硅微陀螺仪基本结构原理,分析了硅微陀螺仪动力学方程以及温度变化对硅微陀螺仪谐振频率、品质因数、标度因数和零偏的影响。然后,设计了基于FPGA的硅微陀螺仪数字化补偿电路。最后,经过温度特性实验得到标度因数和零偏随温度变化曲线,建立了温度补偿模型,提出分段温度补偿方法。经过温度补偿后,标度因数和零偏的温度系数分别由316.66×10-6/℃和366.22°/(h·℃)减小为69.67×10-6/℃和115.25°/(h·℃),证明了补偿方法的正确性和可行性。A digital temperature compensation method was proposed based on integrated temperature sensor for the silicon micro gyroscope. First,the structure of the gyroscope with integrated temperature sensor was discussed. And the dynamics equations and effect of temperature variation to the resonant frequency,quality factor,scale factor and zero bias for the silicon micro gyroscope was analyzed. Then,the digital circuit was designed based on the FPGA. Finally, the relation between scale factor and temperature was acquired by the experiments of temperature characteristics,the compensation model was established and the temperature compensation is implemented. Through the compensation method proposed, the temperature coefficients of the scale factor and zero bias decrease from 316. 66×10^-6/℃ and 366. 22°/（h·℃）to 69. 67×10^-6/℃ and 115. 25 °/（h·℃）respectively. The results exposed that the method is correct and feasible.

关 键 词：硅微陀螺仪 零偏 标度因数 温度补偿 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计]