尺蠖式压电陶瓷驱动电源设计  

Driving power design for inchworm-type piezoelectric ceramic actuator

作　　者：郑楠[1] 王学亮[1] 李佩玥[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春130033

出　　处：《国外电子测量技术》2014年第8期49-52,共4页Foreign Electronic Measurement Technology

基　　金：国家重大科技专项02专题(2009ZX02205)项目

摘　　要：为了满足尺蠖式压电陶瓷驱动器的控制需要,设计了相应的驱动电源。DSP是控制器,通过网口接收上位机的控制命令,通过异步总线与FPGA进行数据通信,FPGA操作4路D/A生成4路满足相应时序要求的波形,波形经过精密运放前级放大和由分立元器件搭建的功率放大,输出到尺蠖式压电陶瓷驱动器的电源输入端。测试和试验表明,电源带宽高,纹波小,阶跃响应特性和动态特性良好,能够精确的控制尺蠖式压电陶瓷驱动器微位移定位,可以应用在精密工程技术领域中。In order to meet the control needs of the inchworm-type piezoelectric ceramic actuator, a driving power is uesigned. DSP is a controller, receiving the control command through the network port, communicating with FPGA by the asynchronous bus. FPGA operates 4 DA to generate 4 waveforms, which meet the special timing requirements. The waveforms are amplified by precision pre-amplifiers and power amplfiers which are built by discrete components, and then are output to the geometrid piezoelectric ceramic actuator. Tests and experiments show that, the power supply of high bandwidth, low ripple, good step response and dynamic characteristics, can precisely control the micro-displacement positioning of the inchworm-type piezoelectric ceramic actuator, and can be applied in the field of preeision engineering.

关 键 词：压电陶瓷驱动器 尺蠖运动 驱动电源 微位移 

分 类 号：TN721.1[电子电信—电路与系统]