基于FPGA的高速多通道AD采样系统的设计与实现  

Design and Implementation of High-speed Multi-channel AD Sampling System Based on FPGA

作　　者：徐加彦 张之万 陈兴林[1] 张广莹[1] 

机构地区：[1]哈尔滨工业大学航天学院,哈尔滨150001

出　　处：《自动化与仪表》2014年第9期49-52,共4页Automation & Instrumentation

摘　　要：光刻机控制系统是高精度伺服控制系统,其控制精度受环境因素(温度、湿度等因素)影响很大。为了实现对光刻机的高精度伺服控制,必须实时反馈周围环境的变化。状态机具有速度快、可靠性高、稳定性好的特点。本课题采用AD7606采样芯片,利用FPGA的可编程逻辑控制的特点,采用状态机思想,通过编程设计AD的读控制时序和读写时序,将采样结果实时保存在双口RAM里,实现高精度多通道AD采样系统。通过实验表明,设计的采样系统其速度、可靠性、采样精度达到要求。Lithography machine control system was the high-precision servo control system,environmental factors（tem- perature,humidity,and other factors）have a significant impact on the control precision. In order to achieve high-pre- cision servo control,real-time feedback of the changes in the surrounding environment was needed. The state ma- chine has the characteristics of high speed,high reliability and stability. This paper uses AD7606 chip sampling,uti- lize the characteristics of FPGA programmable logic control,programming AD read and write timing in the form of the state machine,the real-time sampling results stored in the dual-port RAM,to reach the high-precision multi- channel AD sampling system. The experiments shows that the speed design of the sampling system was reliability and accuracy.

关 键 词：光刻机 AD7606 多通道采样系统 状态机 

分 类 号：TP277[自动化与计算机技术—检测技术与自动化装置]