微波功分网络集成工艺技术  

The Techniques of Microwave Integrated Power Divider Network

作　　者：林玉敏[1] 戴广乾[1] 边方胜[1] 

机构地区：[1]中国电子科技集团公司第二十九研究所,四川成都610036

出　　处：《工业技术创新》2014年第3期334-338,共5页Industrial Technology Innovation

摘　　要：本文主要阐述了微波功分网络集成工艺的关键技术和途径,包括层间电气互联、盲槽结构实现,以及内埋平面集成电阻等。设计制作了工作频段在6-18GHz的四层典型功分网络样件,该功分网络幅度一致性1dB,相位一致性15°,同套网络各端口间隔离≥20dB。采用该工艺制作的功分网络可以在有限尺寸内实现通道的相位和幅度控制以及不同组件间的幅相一致性补偿,这是采用传统的混合集成工艺完全无法实现的。This paper mainly discussed the key techniques and processes of microwave integrated power division network, which involve electric connection of layers, blind cave, and embedding planar integrated resistors. Typical four layer power division network working on 6~18GHz is designed and produced. The consistency of amplitude and phase is 1dB and 15° separately, isolation between each port on the same network is ≥20dB. The power division network manufactured with such technics could achieve channel＇s phase and amplitude controlling, and the amplitude and phase consistency compensation between different modules in limited dimension. This cannot be realized by traditional mixed integrated technics.

关 键 词：功分网络 平面集成电阻 电气互联 

分 类 号：TN626[电子电信—电路与系统]