纳米薄膜乙醇传感器的研制  

Development of ethanol sensors with nano meter films

作　　者：孙冰[1] 程东升[2] 田丰[2] 高金雍[2] 齐景爱[2] 

机构地区：[1]天津市计量监督检测科学研究院,天津300192 [2]河北工业大学,天津300401

出　　处：《传感器世界》2014年第9期7-13,共7页Sensor World

摘　　要：在陶瓷管上用Ti O2溅射法研制纳米薄膜乙醇传感器,同时作了机理分析。利用X射线衍射技术分析确定,在利用溅射法制备Ti O2纳米薄膜时,随着退火温度的提高,所形成的Ti O2薄膜晶体结构由无定型结构,向锐钛矿结构转变,随后又随温度升高逐渐转向金红石结构。晶粒大小随着退火温度的升高而增大,分别为13nm(500℃)、16nm(700℃)、28nm(1100℃)。经500℃退火的样品为锐钛矿晶体结构,晶粒尺寸为13nm,其乙醇灵敏度特性最好。此时元件的最佳加热工作电压8.0V,对应的工作温度为370℃。利用红外光谱测定,反应的生成物中有H2O、CH3CHO、C2H4,分别对应1694cm-1、1756cm-1和1720cm-1的红外吸收峰。但在反应生成物中,没有发现有乙酸产生。Several ethanol sensors are prepared by using TiOz sputtering method on ceramic tubes. And the gas sensitive mechanism is analyzed. It is determined by X-ray diffraction that sputtering can form an amorphous structure of TiO2 thin film. With the annealing temperature increasing, the formed crystal structure of Ti02 thin film transforms from the amorphous structure to the anatase structure, then gradually turning to the rutile structure. At meanwhile , the grain sizes are also bigger and bigger with 13nm（500℃ ）, 16nm（700℃ ）, 28nm（1100℃ ） respectively. After annealed at 500℃ , the sample is anatase crystal structure with grain size of 13nm, and gets the best ethanol sensitivity characteristics. The best working voltage is 8.0V , corresponding to the working temperaatre of 370℃ . It is determined by infrared spectrum that H2O, CH3CHO, C2H4 are formed during reaction, which are corresponding to the absorption peaks of 1694cm^-1,1756cm^-1 and 1720cm^-1 respectively in the infrared spectrum. But no acetate production is found in the reactants.

关 键 词：TiO2纳米薄膜 乙醇传感器 溅射法 红外光谱 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]