基于Petri Net的双臂组合设备故障响应策略的研究  

Failure Response Policy for Dual-Arm Cluster Tools Based on Petri Net

作　　者：余华光[1] 白丽平[1] 

机构地区：[1]广东工业大学机电工程学院,广东广州510006

出　　处：《机电工程技术》2014年第10期20-24,88,共6页Mechanical & Electrical Engineering Technology

基　　金：国家自然科学基金(编号:60574066)

摘　　要：晶圆制造的加工工艺日趋复杂,组合设备加工模块中存在严格的逗留时间约束以及频繁的故障,因此研究其生产调度,排除出现的故障成为至关重要的问题。通过分析双臂组合设备的并行模块及其加工流程模式,建立能够描述系统的稳态特性的Petri Net模型。基于该模型,当双臂组合设备并行模块出现故障时,分析系统的可调度性,对可调度情况提出有效的运行控制策略,使得晶圆不违反严格的逗留时间约束。最后通过实例验证该控制策略的可行性。Since there are many sojourn time constraints and failure in the processing module of cluster tools in semiconductor industry, processing technology for wafer manufacturing becomes more and more complicated. Thus, it is extremely important to study schedule feasibility to eliminating the failures in manufacturing process. This paper analyzed the processing flows of the parallel module for a cluster tool with a dual-arms robot,and developed a Petri Net model for this cluster tool that can describe the steady state characteristics of the whole system. With this PN model, if there are failures appearing in parallel modules, it can analyze the schedule conditions and feasibility, and propose some effective control strategies for different failures’ conditions such that these strategies can satisfy wafer sojourn time constraints at the same time. Finally,we illustrate the proposed analysis and method through several examples.

关 键 词：晶圆制造 双臂组合设备 故障响应 PETRI NET 

分 类 号：TP391[自动化与计算机技术—计算机应用技术] F406[自动化与计算机技术—计算机科学与技术]