基于压电陶瓷光电相移驱动的大行程纳米定位系统  

Long range nano-positioning system based on optoelectronic phase-shift for piezoelectric actuator

作　　者：许素安[1] 谢敏[1] 孙坚[1] 陈乐[1] 王桂荣[1] 

机构地区：[1]中国计量学院机电工程学院,浙江杭州310018

出　　处：《光学精密工程》2014年第10期2773-2778,共6页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.51105348;No.61203113);浙江省钱江人才计划资助项目(No.2013R1066);第45批教育部留学回国启动基金资助项目

摘　　要：由于压电陶瓷驱动器作纳米定位控制系统驱动元件会导致定位过程中出现超调及振荡现象,故提出了一种新的基于外差干涉仪和自制高频相移电路的光电相移压电陶瓷驱动方法。实验论证了在严格控制的实验环境下,压电陶瓷能实现自主位置锁定并以纳米量级步距值被逐步推进。步距值可控的压电陶瓷驱动器与商用宏动平台结合,可实现纳米精度重复性的大行程定位系统。实验结果表明,对于5mm往返行程的位移,在靠近目标处执行理论值为5nm步距值的步进位移时,系统的定位重复性精度小于1nm。该定位方法规避了压电陶瓷的机械非线性误差,具有系统架构简单,定位速度快等优点,可应用于当前纳米科技和超精密加工等领域。As overshoot and oscillation phenomena will occur when a piezoelectric ceramic actuator is taken as a driving element for nano-positioning systems, this paper proposes a new piezoelectric ce- ramic displacement control method based on a home made high frequency phase-shifting electronic cir- cuit and a heterodyne interferometer. On the experiments, it demonstrates that the piezoelectric ce-ramic could be locked actively and be driven step by step in a nanometric scale under a strictly con- trolled experimental environment. This controlled stepper piezoelectric actuator combined with a com- mercial macro stage achieves a displacement system with nanometric repeatability over a millimeter range. Experimental results show that this system has a repeatability smaller than 1 nm when it has o- ver back and forth displacement of 5 mm and executes the step by step displacement with the step val-ue of 5 nm near the target position. The positioning method avoids the mechanical defects of piezoelec-tric actuator and is characteristics by simpler structure, faster positioning and suitable for numerousapplications in nanotechnology and ultra precision machining .

关 键 词：纳米定位系统 外差干涉仪 压电陶瓷执行器 高频相移电路 宏、微二级运动 

分 类 号：TN384[电子电信—物理电子学] TP273[自动化与计算机技术—检测技术与自动化装置]