摇摆质量增强压电体声波固体波动圆盘微陀螺  

Piezoelectric bulk acoustic wave solid disk micro gyroscope with rocking mass enhancement

作　　者：张弓[1] 张卫平[1] 许仲兴[1] 汪濙海[1] 成宇翔[1] 唐健[1] 关冉[1] 陈文元[1] 

机构地区：[1]上海交通大学微纳科学技术研究院,微米/纳米加工技术国家级重点实验室,上海200240

出　　处：《振动与冲击》2014年第19期104-108,共5页Journal of Vibration and Shock

基　　金：教育部新世纪优秀人才支持计划资助项目(NCET-10-0593);微米/纳米加工技术重点实验室基金资助项目(9140C790405110C7904);上海交通大学研究生创新基金资助项目(Z-340-014);科学基金项目(2013ZC57003);预研基金9140A09010312JW03104的支持

摘　　要：提出了一种新型的摇动质量增强压电体声波固体波动圆盘微陀螺。该种陀螺,在结构上采用完全对称的圆盘式结构,在原理上,利用压电体声波的简并模态,而且摇动质量又增强体声波驱动和敏感效应,再由柯氏效应,获得输入角速度。文章介绍了结构,原理,同时又利用仿真分析,优化了参数,给出了该陀螺可有效工作在25 172.8 Hz的体声波二波腹模式下,频率分裂184.6 Hz,具有陀螺效应,仿真得到灵敏度为1.81μV/rad/s。最后,利用MEMS技术,对微陀螺进行了实际加工,并得到了样品。Here,a new type of gyroscope with a completely symmetrical disk was proposed based on an out-of-plane degeneracr mode of bulk acoustic wave.It was used to aim at detecting an angular velocity with Coriolis effect.The bulk acoustic wave driving and sensing were combined in the device.The rocking mass was designed to enhance the driving and sensing efficiency.The structure and working principle of the gyroscope were introduced and then simulation and analysis followed.By parametric optimization,it was shown that this type of gyroscope with proper parameters can work according to a bulk acoustic wave model with double antinodes and it can be used to detect an angular velocity;through simulation analysis,its operation frequency is 25172.8Hz with small frequency split 184.6Hz and its sensitivity is 1.81μV/rad/s.At last ,the micro gyroscope prototype was fabricated.

关 键 词：压电 体声波 柯氏效应 灵敏度 

分 类 号：TH82[机械工程—仪器科学与技术]