基于平滑处理和采样补偿的工作台定位精度误差补偿法  

Error Compensation Method for Precise Table Based on Motion Smoothing and Sampled Dual Loop

作　　者：王荣[1] 张敏良[1] 汲德安 田园[1] 

机构地区：[1]上海工程技术大学机械工程学院,上海201600

出　　处：《轻工机械》2014年第5期43-46,共4页Light Industry Machinery

摘　　要：精密工作台存在的机械间隙是影响工作台定位精度的重要来源。基于采样双闭环和运动平滑处理对工作台误差进行补偿,这种方法与间隙大小无关,仅在进给的终点位置读取反馈误差并实时修正,给出了对精密工作台进行补偿的具体实例,补偿后定位精度从25.00μm提高到1.14μm。通过理论分析和实验验证,表明采样双闭环和平滑处理结合的误差补偿方法对提高系统定位精度十分有效。Mechanical clearance is one of the vital factors which can not be ignored in precise table.To improve the positioning precision,the error curve of a precise table was measured and the system error was compensated based on the sampled dual loop and motion smoothing.The sampled dual loop,reads the load encoder only at the end point and performs a correction.This method is independent of the size of the mechanical clearance.Specific compensation example was given,the positioning precision of the precision table was improved from 25.00 μm to 1.14 μm after compensation.The theoretical analysis and experimental results show that the error compensation method based on the sampled dual loop and motion smoothing is effective to improve the positioning precision for precision table.

关 键 词：精密工作台 误差补偿 采样双闭环 平滑处理 定位精度 

分 类 号：TP202.2[自动化与计算机技术—检测技术与自动化装置]