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机构地区:[1]天津大学精密测试技术及仪器国家重点实验室,天津300072
出 处:《光学学报》2014年第11期135-143,共9页Acta Optica Sinica
基 金:国家自然科学基金(51105273)
摘 要:设计了一种高速扫描频闪激光光栅条纹实时投射系统。系统通过现场可编程门阵列(FPGA)实时监测光电探测器信号并控制激光器的调制输出,使高速旋转的多面棱镜与线激光器调制信号精确配合产生稳定、清晰、精密的频闪激光光栅条纹。系统结合了光栅条纹整体投射和线激光光源高精度的特性,具有刷新速度快、条纹分布精度高的特点,且亮度、频率、脉宽、相移可动态编程实时控制。应用该系统对微小尺寸器件进行了测量,获得了准确反映被测器件三维形貌的相位和特征点数据。该系统在高精度快速三维形貌测量中,尤其是工业现场精密器件在线三维检测场合具有广泛的应用前景。A high-speed scanning real-time stroboscopic laser fringe-pattern projection system is designed. A high- speed rotating polygon mirror and a line-structured laser cooperate to produce stable and unambiguous stroboscopic fringe patterns. The system is realized by using field programmable gate array (FPGA) to monitor photoelectric- detector signal and control the output modulation signal of laser accurately in real time. The system combines the overall projection of grating with the high accuracy of the line-structured laser light source. The projected fringe patterns have high refresh rate and high precision. In addition, the intensity, frequency, pulse width and phase shift can be controlled in real time by dynamic programming. A small size device is measured by using the proposed system, and the corresponding accurate phase and characteristic points that can show the three-dimensional shape are obtained. The proposed system shows a broad application prospect for fast three-dimensional shape precision measurements, particularly in the industrial field of three-dimensional online detection for precision devices.
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