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出 处:《光学精密工程》2014年第11期3067-3073,共7页Optics and Precision Engineering
基 金:四川省高校院所应用成果转化计划资助项目(No.12DXYB171JH-002)
摘 要:针对Sawyer电机驱动的平面定位台的多轴精密定位问题(X、Y和θz轴),提出了一种新的部分无传感控制方法。用激光干涉仪检测定位台一个方向上的平移运动和摆动,并构建相应的闭环控制;同时,应用滑模观测器估计另一个方向上的平移运动并构建对应轴的闭环控制。在此基础上,通过实验从开环控制、多轴全闭环控制及部分无传感控制三方面对比了定位性能。实验结果表明:采用部分无传感控制,多轴平面定位台的重复定位精度达到亚微米(0.25μm)级;部分无传感控制下的动子行程与开环控制相同(X轴300mm、Y轴300mm),远大于基于多轴位置传感的全闭环控制下的动子行程(X轴100mm、Y轴100mm);获得的结果可满足应用设计要求。A novel Partial Sensorless Control (PSC) method was proposed to improve the precision positioning capability of multi-DOF (X,Y and θz) motion for a planar motion stage driven by Sawyer motor.For the position estimation,a laser interferometer was used to detect the translational motion and swing in one direction and to construct a closed-loop control; a sliding mode observer-based technique was taken to estimate the translational motion in another direction and to construct a closed-loop control for a corresponding axis.The positioning performance on open-loop control,closed-loop control and PSC was compared by experiments.The experimental results verify that the PSC is an available way to obtain submicron-order positioning accuracy (0.25 μm) with a 300 mm (X) ×300 mm (Y) travel range,which is more larger than that of 100 mm (X)× 100 mm (Y) travel range from the closed loop control of a multi-DOF (X,Y and θz) location sensing.The result meets the design requirement of positioning accuracy and travel range for planar motion stages.
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