太阳能电池制造中化学浓度的预先控制介绍  

Introduction About Advanced Process Control of Chemical Concentration for Solar Cell Manufacturing

作　　者：冯小强[1] 祝福生[1] 关宏武[1] 宋文超[1] 

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2014年第8期25-27,共3页Equipment for Electronic Products Manufacturing

摘　　要：太阳能电池的制造需要许多湿清洗步骤。制绒是这些步骤之一,这个阶段是非常重要的,用它可以确保单晶硅和多晶硅电池片的高效率。为了获得稳定和可循环使用的制造工艺,精确可靠的实时测量刻蚀成分主要针对太阳能电池片生产中化学液浓度的预先控制进行介绍。Solar cell manufacturing requires many wet cleaning steps. Texturization is one of these steps. This step is very critical to assure high efficiency for cells based on both mono-crystalline and multi-crystalline silicon. In order to obtain stable and reproducible manufacturing processes, a reliable and accurate real-time measurement of the etching constituents becomes necessary. This article is mainly introduce for the advanced process control of chemical concentration for solar cell manufacturing.

关 键 词：太阳能 制绒 化学浓度 控制 

分 类 号：TN948.43[电子电信—信号与信息处理]