MEMS中变截面梁优化数学模型的建立  

THE OPTIMIZATION MODEL ESTABLISHMENT OF NONUNIFORM BEAM IN MEMS

作　　者：易源霖[1] 孙江宏[1] 

机构地区：[1]北京信息科技大学机电工程学院,北京100192

出　　处：《机械强度》2014年第6期889-893,共5页Journal of Mechanical Strength

基　　金：国家自然科学基金(51275052);北京市自然科学基金重点项目(3131002);北京市教委科研计划重点项目(KX201311232036)~~

摘　　要：MEMS结构中采用变截面梁来降低应力集中的影响。建立变截面梁弯曲和振动的数学模型,对MEMS器件加工工艺提供可靠的理论依据。以增加空间利用率且保持最大转角、最大挠度和基频不变作为前提条件,分别构建最大转角尺寸刚度、最大挠度尺寸刚度表达式和基频关系式,并结合有限元分析,构建对原设计方案的优化思路,为MEMS中类似结构的设计提供优化方法。Non-uniform beam is used to reduce stress concentration in MEMS structure. The mathematical model of the non-uniform beam bending and vibration can provide reliable theory basis to MEMS components processing. By increasing space utilization and keeping maximum angle, maximum deflection and fundamental frequency unchanged, constructed the maximum angle dimensions stiffness, the maximum deflection dimensions stiffness expression and fundamental frequency relation separately, and made the optimization for the original design combining with finite element analysis, provided an optimization method for the design of the similar structure in MEMS.

关 键 词：MEMS 变截面梁 最大转角尺寸刚度 最大挠度尺寸刚度 基频 

分 类 号：TH16[机械工程—机械制造及自动化] TP242[自动化与计算机技术—检测技术与自动化装置]