单片集成四元阵列式MEMS矢量水听器的研究  

Research of array MEMS vector hydrophone with four units on a chip

作　　者：简泽明[1,2] 陈尚[3] 张国军[1,2] 刘梦然[1,2] 许娇[1,2] 张文栋[1,2] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051 [2]中北大学电子测试技术重点实验室,山西太原030051 [3]中国运载火箭技术研究院研究发展中心,北京100076

出　　处：《传感器与微系统》2015年第1期9-12,16,共5页Transducer and Microsystem Technologies

基　　金：国家"863"计划资助项目(2013AA09A412);国家自然科学基金资助项目(61127008;51205374);山西省青年科技研究基金资助项目(2012021013-3)

摘　　要：针对当前对MEMS矢量水听器高可靠性迫切要求,设计了2×2单片集成四元阵列式MEMS矢量水听器,以保证其中一个敏感微结构失效损坏或工作不正常时,水听器仍能正常工作。结合ANSYS软件对阵列敏感微结构进行了仿真分析;设计了该微结构的加工工艺流程;最后,对阵列式MEMS矢量水听器进行水声校准测试。测试结果表明:阵列式水听器可靠性明显提高,灵敏度达到-179 d B(0 d B=1V/μPa),具有良好的"8"字指向性。Introduce a kind of 2 ×2 array MEMS vector hydrophone with four units on a chip, which is designed to meet urgent demand of higher reliability of MEMS vector hydrophone, to ensure when one of the sensitive microstrueture is damaged or doesn＇ t work properly, the hydrophone can still work well. The microstrueture of the hydrophone is simulated by ANSYS; then, microstructure machining process is designed; array MEMS vector hydrophone is measured by underwater standing wave field. Test results show that reliability of hydrophone is improved significantly and sensitivity of hydrophone is --179 dB （0 dB =lV/μPa） ,possessing a good directional pattern in the form of ＂8＂shape.

关 键 词：阵列式MEMS矢量水听器 可靠性 灵敏度 指向性 

分 类 号：TP565.1[自动化与计算机技术]