快速冷热循环仪的研制  

Design and Fabrication of Rapid Cool-thermal Cycle System

作　　者：胡慧[1] 金清[1] 王慧[1] 董阳[1] 吴伟鸿[1] 虞栋伟 陶旭东[1] 洪庆[1] 鹿业波[1] 

机构地区：[1]嘉兴学院机电工程学院,浙江嘉兴314001

出　　处：《科技视界》2015年第2期64-65,共2页Science & Technology Vision

基　　金：国家级大学生创新创业训练计划项目(201310354009);浙江省钱江人才资助项目(QJD1302007)

摘　　要：本文设计了一种快速冷热循环仪,可以实现对金属薄膜材料快速变温的控制,用于研究温度变化对薄膜的影响以改善集成电路的可靠性。该仪器包括升降位移机构、运动控制系统和水冷系统及加热系统等。通过计算机控制伺服电机以驱动移动装置快速上升和下降,从而使加热系统靠近及远离金属薄膜材料,使其迅速变温达到设定温度,通过冷却循环系统达到辅助降温的目的。该方法实现了对温度、时间、循环次数的控制,既可以迅速升温,快速给金属材料加热,又通过冷却液的循环加快降温速率。A new type of instrument about rapid heating and cooling system was designed in this paper. It can achieve the rapid change of the thin metallic fihn temperature, and it can be used to improve the reliability of integrated circuits. The instrument included lift displacement mechanism, the motion control system, and the cooling and heating system. Through operation of the computer and drive of the servo motor, it can quickly control the rise and fall of the shifting device. In this way, the heating system was going to be closed to/away from the thin metallic fihn. Then these materials will quickly reach to the pre-deterulined temperature with cooling system. The temperature, time, and cycle process can be controlled to decrease/increase metallic film temperature quickly.

关 键 词：金属薄膜 快速冷热 冷热循环仪 温度控制 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]