MEMS电容式压力传感器检测电路比较研究  

Research on Detection Circuits for MEMS Capacitive Pressure Sensor

作　　者：黄雨濛[1] 戚昊琛[1] 胡智文[2] 张鉴[1] 

机构地区：[1]合肥工业大学电子科学与应用物理学院,安徽合肥230009 [2]浙江传媒学院新媒体学院,浙江杭州310018

出　　处：《电子科技》2015年第1期186-189,共4页Electronic Science and Technology

基　　金：东南大学MEMS教育部重点实验室开放基金资助项目(LY13F010006);浙江省自然科学基金资助项目(LY12F02014);合肥工业大学科学研究发展基金资助项目(J2014HGXJ0091;J2014HGXJ0082)

摘　　要：介绍了MEMS电容式压力传感器检测电路的5种实现方式:脉宽调制法、运算放大器法、电荷注入法、调频法和AC运放法。并从稳定性、测量灵敏度及抗杂散性等方面介绍了不同方式下检测电路的优缺点,为MEMS电容式压力传感器提供了参考。MEMS capacitive pressure sensor has the advantages of low power consumption, good temperaturestability, solid and fast dynamic response. Five kinds of detection circuit for MEMS capacitive pressure sensor areintroduced, which are based on PWM, operational amplifiers,These detection circuits are compared in stability, sensitivity ofaspects, and their advantages and disadvantages are concludeddetection circuit for MEMS capacitive pressure sensor.charge injection, FM and AC amplifier respectively.measurements, resistance to spurious and some other This paper provides useful references to designer ofdetection circuit for MEMS capacitive pressure sensor.

关 键 词：微电子机械系统 电容压力传感器 检测电路 优缺点 

分 类 号：TN710.1[电子电信—电路与系统]