Sol-gel法制备共掺杂ZnO∶Al/N/F薄膜的性能研究  

PROPERTY STUDY OF CO-DOPED Zn O∶Al/N/F THIN FILMS BY SOL-GEL METHOD

作　　者：马洪芳[1,2] 马芳[1] 刘志宝[3] 孙华[1] 张志坚[1] 王小蕊[1] 

机构地区：[1]山东建筑大学材料科学与工程学院,济南250101 [2]教育部省部共建可再生能源建筑利用技术重点实验室,济南250101 [3]山东省化工研究院,济南250014

出　　处：《太阳能学报》2014年第12期2407-2412,共6页Acta Energiae Solaris Sinica

基　　金：国家自然科学基金(51275279);山东省科技发展计划(2010G0020318);山东省自然科学基金(ZR2010EM062);济南市高校自主创新计划(201401233);山东省教育厅科技计划(J12LA12)

摘　　要：采用溶胶．凝胶法在普通载玻片上旋涂制备出Al、N、F三掺杂ZnO薄膜（ZnO：Al／N／F），分别研究溶胶浓度和掺杂浓度对薄膜结构、表面形貌以及光电性能的影响。通过X射线衍射仪、扫描电子显微镜、可见分光光度计、双电测四探针电阻率测试仪进行测试与分析。结果表明：制备出的ZnO：Al／N／F薄膜致密均匀，平整光滑，为高结晶质量的（002）C轴择优取向；当溶胶浓度为0．75mol／L、掺杂浓度为O．90at％时，薄膜在可见光范围内（390～780nm）的平均透过率可达87．9％，掺杂浓度为1．05at％时电阻率最小，为O．23Ω·cm。The co-doped ZnO thin films （ZnO： Al/N/F） were successfully synthesized by the sol-gel method using spin coating technique. The effects of the sol concentration and doping concentration on the structure, surface morphology and photoelectric property of thin film were studied. The thin films were analyzed and tested by X-ray diffraction, scanning electron microscopy, spectrophotometer, four probe resistivity tester. The results showed that the surface morphology of the ZnO： Al/N/F films is smooth and dense, the grain size is uniform, and the films are high crystalline quality of （002） preferred along the C-axis orientation. In the range of visible light （390-780 nm） , the average transmittance rate is 87.9% when the sol concentration is 0.75 mol/L and the doping concentration is 0.90at%. The minimum resistivity is 0.23 Ω·cm when the doping concentration is 1.05at%.

关 键 词：溶胶-凝胶法 ZNO薄膜 共掺杂 光电性能 

分 类 号：TB34[一般工业技术—材料科学与工程]