用于MEMS矢量水听器流激噪声抑制的“三明治”式封装结构设计与性能测试  

Design and Test of“Sandwich”-Type Anti-Flow Noise Package Structure for MEMS Bionic Vector Hydrophone

作　　者：张国军[1] 刘林仙[2] 王盼盼[2] 杨士莪 张文栋[2] 

机构地区：[1]西北工业大学航海学院,陕西西安710072 [2]中北大学电子测试技术国防科技重点实验室,山西太原030051

出　　处：《测试技术学报》2015年第1期14-19,共6页Journal of Test and Measurement Technology

基　　金：国家863资助项目(2011AA040404);国家青年科学基金资助项目(51205374)

摘　　要：MEMS仿生矢量水听器应用于水下环境,必须解决透声,绝缘,流激噪声抑制等问题.为此,提出"三明治"式封装结构.完成了"三明治"式封装结构设计计算与试制测试;并通过典型使用环境试验验证该封装结构的流激噪声抑制能力.试验结果表明:该封装结构在几乎不损失灵敏度和矢量性的前提下,比前期的封装结构在抑制流激噪声能力方面提高20dB以上.The problem about sound transmission,insulation and flow noise control must be solved when MEMS vector hydrophone be used in water.Therefore a “sandwich”-type package structure for MEMS vector hydrophone was put forward to solve these problems,the design,simulation,manufac-ture,and testing works had been fulfilled.The flow-induced noise immunity of the package structure was verified by using typical environmental testing.The experimental results of MEMS vector hydro-phone with “sandwich”-type package in typical application environment showed that the ability of flow noise control of new structure is 20 dB higher than the current package structure,and no loss for sensi-tivity and directional character.

关 键 词：微电子机械系统 矢量水听器 流噪声 封装结构 指向性 

分 类 号：TP565.1[自动化与计算机技术]