高硬度、低应力类金刚石薄膜的制备及其摩擦学行为  

Preparation and Tribology Behavior of Diamond-like Carbon Film of High Hardness and Low Stress

作　　者：周升国[1] 刘正兵[1] 刘龙[1] 马利秋[1] 

机构地区：[1]江西理工大学材料科学与工程学院,江西赣州341000

出　　处：《超硬材料工程》2014年第5期13-17,共5页Superhard Material Engineering

基　　金：江西省教育厅一般科技项目(GJJ13394);中国科学院国家重点实验室开放基金(LSL-1203)

摘　　要：采用直流磁控溅射金属Al和C石墨组合靶,在单晶硅和不锈钢基底上成功制备出含Al的非氢类金刚石a-C(Al)薄膜。采用XPS、Raman、纳米压痕仪和摩擦磨损试验机等手段分析和研究了a-C(Al)薄膜的结构、力学以及摩擦磨损性能。结构表征显示,引入到类金刚石碳膜中的金属以原子或纳米团簇的形式存在,且一定程度上促进碳网络中sp2杂化键的形成。力学性能测试表明,a-C(Al)薄膜获得较低内应力同时,仍具有高硬度特性。摩擦学性能表明,a-C(Al)薄膜干摩擦时其摩擦系数约为0.07,磨损率仅为4.6×10–16 m3 N-1 m-1左右。良好的综合力学性能以及致密、连续的石墨化碳转移膜是a-C(Al)碳膜获得较好摩擦、磨损性能的关键因素。Al-bearing non-hydrogen a-C（Al） diamond-like carbon film has been successfully prepared on a monocrystalline silicon and stainless steel substrate by DC magnetron sput- tering metal Al and C graphite conbination. The structure, machanics and friction and wear performance of the a-C（Al） film has been analyzed and studied under equipments such as XPS, Raman, nano-indenter and friction wear testing machine. The structural characterization shows that the metal in the diamond-like carbon film exists in the form of atom or nanocluster which promotes the formation of sp2 hybrid bond in the carbon network to some extent. The mechanics performance testing shows that the a-C（Al） film remains its high hardness characteristic even when it obtains lower internal stress. The tribology performance shows that during dry friction the friction coefficient of the a-C（Al） film is about 0.07 and the wear rate is only about 4.6 × 10-16 m3N-1 m-1. Good comprehensive mechanical properties and compact and continuous graphitized carbon transfer membrane are the key elements for a-C（Al） carbon film to achieve good friction and wear performance.

关 键 词：类金刚石薄膜 磁控溅射 a-C(Al) 力学性能 摩擦磨损 

分 类 号：TB383.2[一般工业技术—材料科学与工程]