面向电子制造的高速精密宏微运动平台研究  

An Investigation on High Speed and High Precision Macro-Micro Composite Motion Stage for Electronic Manufacture

作　　者：黄特生 高健[1] 周志强[1] 张揽宇 陈小国[1] 

机构地区：[1]广东工业大学机械装备制造与控制技术教育部重点实验室,广州510006

出　　处：《组合机床与自动化加工技术》2015年第2期50-54,共5页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：国家自然科学基金(U1134004);国家重点基础研究发展计划(973计划)项目(2011CB013104);广东省高等学校科技创新重点项目(2012CXZD0020);广东省战略性新兴产业专项(2012A080303004)

摘　　要：在分析宏微复合驱动技术的基础上对高速高精度定位的宏微复合运动平台进行了研究,并研制了基于音圈电机驱动和压电陶瓷驱动的宏微复合运动平台。该平台的宏运动由音圈电机驱动,可实现高加速度和大行程运动;微运动由与音圈电机主轴相连接的压电陶瓷驱动,用以补偿宏运动所产生的定位误差并抑制宏微运动切换所产生的振动,达到平台的精密定位目标。最后,基于所搭建的宏微复合定位系统,开发了平台的控制系统软件,并开展了一系列的实验测试。结果表明,本研究开发的宏微复合定位平台具有良好的工作性能,可满足电子制造高速高精密定位的需要。On the basis of analyzing the macro-micro composite driving technology, a high speed and high precision macro-micro composite motion stage is investigated in this paper. This stage is composed of a voice coil motor and a piezoelectric actuator, in which macro motion with high acceleration and long stroke is realized by the voice coil motor, while the micro motion with high positioning precision is realized by the piezoelectric actuator connected to the shaft of the voice coil motor, which is used for compensating the posi-tioning error resulting from the macro motion and reducing the mechanism vibration arising from the macro-micro motion switching, then, a high precision positioning can be achieved successfully. Finally, system control software is developed and a series of experiments are conducted based on the established experimental setup. All the results prove that the developed macro-micro composite motion stage has a satisfactory per-formance for further high performance positioning in electronic manufacture.

关 键 词：宏微复合运动平台 音圈电机 压电陶瓷驱动器 电子制造 

分 类 号：TH166[机械工程—机械制造及自动化] TG506[金属学及工艺—金属切削加工及机床]