基于力学咬合的楔形腔锥形光纤耦合封装结构研究  

Research on Coupling Package Structure of Wedge-resonator and Tapered Fiber Based on Mechanical Bite

作　　者：王明焕[1] 唐军[1] 郭泽彬 郭浩[1] 贾志浩[1] 张伟[1] 商成龙 王飞[1] 薛晨阳[1] 张文栋[1] 刘俊[1] 

机构地区：[1]中北大学电子测试技术国防科技重点实验室和仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《科学技术与工程》2015年第7期92-94,128,共4页Science Technology and Engineering

基　　金：国家自然科学基金重点项目(91123036);国家自然科学基金科学仪器基础研究(61127008);国家自然科学基金(91123016);国家杰出青年科学基金(51225504);国家重点基础研究发展计划(2012CB723404);山西省高等学校优秀青年学术带头人支持计划资助

摘　　要：对楔形腔光场传输模式进行对比分析,改变MEMS工艺参数,加工出楔角外侧下边缘带有"齿"的10°楔角楔形腔;设计光纤架与壳体,采用力学咬合的方式,对锥形光纤耦合位置进行固定,实现力学无胶封装,消除了封装材料性能退化对倏逝场产生的破坏,获得了稳定的倏逝场耦合模式,进而得到稳定的高品质因数(Q);封装前后楔形腔倏逝场耦合模式改变微小,Q值不随时间产生退化。使用高速转台对封装结构进行稳定性测试,5g离心转动前后,楔形腔与锥形光纤耦合位置不变。On the basis of analyzing the light field transmission mode in wedge-resonator with different structures, the parameters of MEMS technology is changed to fabricate a wedge-resonator with a lO--degree ＂tooth＂ on the edge of the wedge angle＇ s lateral ; In the way of mechanical bite, a fiber frame and shell are designed to fix the coupling position of the tapered fiber, realizing mechanical encapsulate without poly, cancelling the damage of eva-nescent field resulting from degeneration of the encapsulate material＇ s performance, obtaining stable evanescent field coupling mode and then getting a stable high-Q;evanescent field coupling mode of wedge-resonator performs stable before and after package, Q value shows no degeneration with time flowing. The stability of package structure is carried on with high speed rotary table, showing that the coupling position of wedge-resonator and tapered fiber stay invariant before and after 5 g centrifugal rotation.

关 键 词：楔形腔 MEMS工艺 力学咬合 倏逝场 封装 

分 类 号：TN253[电子电信—物理电子学]