静电驱动柔性振膜的吸合特性研究  

Research on Pull-in Characteristics of a Flexible Membrane Under the Electrostatic Actuation

作　　者：张彧[1,2] 王文[2] 赵小林[3] 丁桂甫[3] 

机构地区：[1]上海卫星工程研究所,上海200240 [2]上海交通大学制冷与低温工程研究所,上海200240 [3]上海交通大学微纳科学技术研究院微米/纳米加工技术重点实验室,上海200240

出　　处：《微纳电子技术》2015年第4期226-232,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(50976067)

摘　　要：对静电驱动柔性振膜的吸合特性进行了理论分析和实验观测。通过理论计算得到了静电驱动下柔性振膜与具有连续曲面的腔体实现完全吸合的吸合电压。完全吸合电压随振膜电极与腔体直径的偏差以及振膜初始应力的增大而增大。同时,通过实验验证了静电驱动下柔性振膜的电极与具有连续曲面的腔体在驱动电压100 V、驱动频率2.5 Hz的条件下能够实现完全吸合。振膜电极与腔体直径的偏差会导致振膜所受静电力以及二者之间的电容能均呈现出明显的不均匀性,因此二者的完全吸合过程呈现出显著的非中心对称特性。The theoretical analysis and experimental observation of pull-in characteristics for the flexible membrane under the electrostatic actuation were carried out.The complete pull-in voltage between the flexible membrane and the cavity with the continuous surface under the electrostatic actuation was obtained by the theoretical calculation.The complete pull-in voltage increases with the increase of the diameter deviation between the membrane electrode and the cavity,as well as the residual stress of the membrane.Meanwhile,the complete pull-in phenomenon between the flexible membrane electrode and cavity with the continuous surface was experimentally observed under the actuation voltage of 100 V and the actuation freguency of 2.5 Hz.The obvious asymmetries in the electrostatic force on the membrane and the capacitive energy between the membrane electrode and cavity appeared induced by the diameter deviation between the membrane electrode and the cavity.Therefore,the complete pull-in process is significantly noncentrosymmetrical.

关 键 词：静电驱动 柔性振膜 吸合特性 完全吸合电压 非中心对称 

分 类 号：TH703[机械工程—仪器科学与技术]