MEMS壁面剪应力传感器阵列水下标定实验研究  

Calibration of MEMS wall shear-stress-sensors array for underwater applications

作　　者：田于逵[1] 谢华[1] 黄欢[1] 孙海浪[1] 张楠[1] 沈雪[1] 

机构地区：[1]中国船舶科学研究中心水动力学国防科技重点实验室,江苏无锡214082

出　　处：《实验流体力学》2015年第2期8-12,25,共6页Journal of Experiments in Fluid Mechanics

基　　金：水动力学重点基金(14010511CB32);国家重大科学仪器设备开发专项(2013YQ040911)

摘　　要：壁面剪应力的精确测量对于研究水下物体边界层流动、寻求有效的减阻增效措施至关重要。MEMS壁面剪应力传感器的标定首先是最基本的静态标定,其决定了其测量的精度和数据的可信度。本文在分析已有标定方法的基础上研发1种新型水下壁面剪应力给定装置,并采用数值方法计算分析不同流速下的壁面剪应力给定条件,进而设计壁面剪应力传感器静态标定方案,开展了一种MEMS热膜式壁面剪应力传感器阵列的水下静态标定实验,获得了各传感单元的标定系数。The measurement of wall shear stress on hydrodynamic surface is important for the design of advanced naval technology,and,accurate calibration,especially the static calibration, of the shear stress sensor is indispensable to any practical measurement.In the paper,an under-water calibration apparatus is developed based on analyzing the existing calibration methods.CFD simulation is performed to predict the wall shear stress input for the static calibration,and facili-tate the design of calibration schedule.Then a typical thermal MEMS shear-stress-sensors array is statically calibrated for underwater applications.The calibration coefficients of the sensors in the array are obtained in situ,which would be of use to the future underwater model tests.

关 键 词：壁面剪应力 MEMS 传感器阵列 水下 标定 

分 类 号：O352[理学—流体力学]