MEMS微结构静态测试技术的发展及应用  

Static testing technology of microstructure in micro electro mechanical systems

作　　者：张立平[1] 卢清华[1] 

机构地区：[1]佛山科学技术学院机电工程系,广东佛山528000

出　　处：《佛山科学技术学院学报（自然科学版）》2015年第3期5-9,共5页Journal of Foshan University(Natural Science Edition)

基　　金：国家自然科学基金资助项目(51105077);广东省精密装备与制造技术重点实验室开放基金资助项目

摘　　要：对国内外众多学者提出的各种微几何量和微机械量的静态测试技术进行了总结,并讨论了其应用场合和测试范围,在此基础上分析得出非接触式光学测试方法受到众学者的青睐,微视觉测量是MEMS静态测试技术的一个主要发展方向。Micro geometry and mechanical parameters are mainly tested by static testing technology of Microstructure in MEMS, which directly influence the characteristics, interchangeability and motion of microstructure. So static testing has important significance. With the development of MEMS static testing technology has also renewed. In the paper static testing techniques of MEMS are analyzed systematically and application and testing range are discussed of various technologies of micro geometry and mechanical parameters. Noncontact optic testing technique is getting more attention and the micro-vision measurement will be the main development direction of static testing technology of Microstructure in MEMS.

关 键 词：MEMS 静态测试 微几何 微机械 微视觉测量 

分 类 号：TH741.8[机械工程—光学工程]