降低高分子电容式湿敏元件湿滞的实验研究  

Experimental study on humidity hysteresis reducing of polymer capacitive humidity sensitive element

作　　者：郑丽[1] 金建东[1] 司良有[1] 王成杨[1] 张鹏[1] 王亚彬[1] 

机构地区：[1]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150001

出　　处：《传感器与微系统》2015年第6期27-29,共3页Transducer and Microsystem Technologies

摘　　要：针对高分子电容式湿敏元件的湿滞无法通过后续电路完全实现补偿的问题,提出了从高分子电容式湿敏元件本身降低湿滞的方法。主要从制作工艺、湿敏材料的选择两方面进行了实验验证,并对制作完成的高分子电容式湿敏元件进行性能测试与数据分析。实验结果表明:通过控制制作工艺和对湿敏材料进行改性可以降低湿滞,湿滞优于1.5%RH。采用该方法制作的湿敏元件无需再次通过后续电路进行湿滞补偿。Aiming at problem that humidity hysteresis of polymer capacitive humidity sensitive element can not be completely compensated by circuit,propose a method to reduce hysteresis from humidity sensitive element. The experimental verification is accomplished mainly based on two aspects that are the fabrication process and sensitive material selection,and property test and data analysis on the completed sensor samples are given. Experimental results and indicate that the humidity hysteresis can be reduced through fabrication process control and sensitive material modifying,humidity hysteresis prior to 1. 5%RH. Using this method,hysteresis compensation by follow-up circuit is not necessary.

关 键 词：湿滞 湿敏元件 湿敏材料 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]