大口径光学元件检测平台的模态分析及其实验研究  

Modal Analysis and Experiment on Large-aperture Optics Inspection Stages

作　　者：廖然[1] 李旦[1] 陈明君[1] 张文明[1] 肖勇[1] 

机构地区：[1]哈尔滨工业大学,哈尔滨150001

出　　处：《航空精密制造技术》2015年第3期1-4,31,共5页Aviation Precision Manufacturing Technology

基　　金：国家自然科学基金(51275113);国家科技重大专项(2013ZX04001000-215)资助项目

摘　　要：针对大口径光学元件检测平台,利用ANSYS软件建立其有限元模型并进行模态仿真,获得前6阶固有频率与振型,并通过模态试验分析获得频域内传递函数。计算模态分析与试验模态分析结果基本一致,表明模型建立正确可靠。以建立的有限元模型为基础,选取气浮支撑刚度及柔性铰链结构参数作为变量,进行模态仿真,研究其对平台固有频率的影响。结果表明,气浮支撑刚度对平台整体固有频率影响小于1.5%,柔性铰链簧片厚度对其影响大于20%,可通过选择合理厚度改善平台的动态特性。Modal simulation is performed by building finite element model on large-aperture optics inspection stages by using ANSYS, and first six natural frequencies and mode shapes are acquired. Related modal experiments are performed to verify its result, proving the validity of simulation analysis. In order to improve stiffness of stages, flotation support stiffness and flexible hinge structure parameters are chosen as variables, to study their effects on the natural frequency of the stages. The result shows that flotation support stiffness has effect less than 1.5% on stages stiffness, while thickness of flexible hinge has significant effect more than 20%, which can be chosen to optimize dynamic characteristic of the stages.

关 键 词：大口径 检测平台 模态分析 气浮 柔性铰链 

分 类 号：O437[机械工程—光学工程]