光刻物镜主动变形镜像差补偿分析  

Aberration Compensation Analysis of Active Deformable Lens in Lithographic Objective Lens

作　　者：东立剑 赵磊[1] 张德福[1] 于新峰[1] 倪明阳[1] 李显凌[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033

出　　处：《激光与光电子学进展》2015年第7期232-238,共7页Laser & Optoelectronics Progress

基　　金：国家重大专项02专项(2009ZX02205)

摘　　要：为补偿光刻物镜由不均匀照明引入的Z5像散,设计了一种主动变形镜,并分析该主动变形镜的像散补偿性能。利用有限元分析方法,建立主动变形镜的有限元模型,得到主动变形镜调节能力、刚体位移误差、固有频率及最大应力等性能。结果表明,主动变形镜在50 N驱动力作用下可以实现镜片表面面形均方根(RMS)837 nm Z5像散补偿,伴随产生的镜片表面高阶像差仅为RMS 1.124 nm,三个方向刚体平移仅为0.49、0.52、0.13 nm,三个方向的刚体旋转仅为2.21、1.73、1.10 ms,主动变形镜一阶固有频率达到2555 Hz,最大应力为0.852 MPa,满足光刻物镜像散补偿需求。An active deformable lens with small coupling error is designed to meet the requirement of astigmatism compensation because of non-uniformed illumination in lithographic objective lens. The capability of the active deformable lens is studied. The finite element model is established. Based on the finite element model, adjustment ability, rigid movement error, natural frequency and maximum stress of the active deformable lens are analyzed. Analytic results indicate that the active deformable lens is able to regulate root mean square （RMS） 837 nm astigmatism compensation Z5 with 50 N drive force. The high order aberration only is RMS 1.124 nm. The rigid movement error of translation and rotation axe 0.49, 0.52, 0.13 nm, 2.21, 1.73, 1.10 ms, the first order natural frequency is 2555 Hz, and the maximum stress of lens is 0.852 Mpa. The active deformable lens satisfies the requirement of astigmatism compensate in lithographic objective lens.

关 键 词：成像系统 主动光学 像散补偿 有限元分析 

分 类 号：TH74[机械工程—光学工程]