多孔硅相对湿度传感器的设计  

The Design of The Porous Silicon Relative Humidity Sensor

作　　者：张胜兵[1] 许高斌[1] 陈兴[1] 马渊明[1] 

机构地区：[1]合肥工业大学电子科学与应用物理学院安徽省MEMS工程技术研究中心,合肥230009

出　　处：《传感技术学报》2015年第5期617-622,共6页Chinese Journal of Sensors and Actuators

基　　金：国家863计划项目(2013AA041101);安徽省科技攻关计划项目(10120106005)

摘　　要：基于对三明治型与平铺型两种多孔硅湿度传感器结构的灵敏度分析与比较,结合两种结构的优点,设计出新的传感器的结构。通过对该结构湿度传感器的性能测试,得出该传感器的灵敏度为1.1 p F/RH%,响应时间为73 s,温度湿度系数为0.5%RH/℃,该湿度传感器适用于在中低湿环境中测量,在每隔20 d的时间对传感器跟踪测试,证明该传感具有较好的稳定性。此外为了传感器可以自解吸附,该传感器采用多晶硅为传感器加热除湿,在金属电极上溅射一层钝化层以防止电极被水汽腐蚀。This paper analyses and compares the sensitivity of two types of porous silicon humidity sensor--the sand- wich type and the tiled type. A structure of porous silicon humidity sensor which combines the advantages of these two kinds of structure is designed in this paper. By testing the performance of the structure of humidity sensor, it is concluded that the sensitivity of the sensor is 1.1 pF/RH%, the response time is 73 seconds and the temperature hu- midity coefficient is 0.5%RH/~C. The humidity sensor is used in low and medium humidity environment and the re- suits show that the sensor has an outstanding performance of stability in the sensor tracking test of every 20 days. The polysilicon for heating and dehumidification is adopted for the sensor＇s desorption. The metal electrode is also covered with a passivation layer to prevent the corrosion caused by water vapor.

关 键 词：MEMS 湿度传感器 仿真 实验 多孔硅 自解吸附 

分 类 号：TB33[一般工业技术—材料科学与工程]