石英微机械陀螺敏感芯片的抗振动分析与改进  

Analysis and Improvement of Anti-Vibration Characteristic for the Sensitive Chip of Quartz MEMS Gyroscope

作　　者：李文蕴[1,2,3] 林日乐[1,2,3] 满欣[1,2,3] 

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060 [2]重庆市固态惯性技术企业工程技术研究中心,重庆401332 [3]重庆市固态惯性技术工程实验室,重庆401332

出　　处：《压电与声光》2015年第4期554-557,共4页Piezoelectrics & Acoustooptics

基　　金：重庆市青年科技人才培养计划基金资助项目(cstc2014kjrc-qnrc40003)

摘　　要：石英微机械陀螺是振动惯性器件,而陀螺敏感芯片结构的抗振动能力会直接影响陀螺的性能。由于工作环境的振动会对陀螺的性能产生一定的影响,因此需提高陀螺敏感芯片结构的抗振动能力。该文利用有限元仿真软件对敏感芯片结构进行随机振动仿真分析,通过对敏感芯片结构的优化,提高了陀螺的抗振动能力。Quartz MEMS gyroscope is vibrating inertial devices. And the anti-vibration ability of sensitive chip directly affects the performance of the gyro. Because the performance of gyroscope may be impacted by the vibration working environment, the ability of anti-vibration for sensitive chip of gyroscope has to be improved. The random vi- bration simulation analysis of the sensitive chip structure has been carried out by using the finite element simulation software. The anti-vibration ability of the sensitive chip has been improved through optimizing the sensitive chip structure.

关 键 词：石英微机械 陀螺 随机振动 有限元 

分 类 号：TN249[电子电信—物理电子学] V249[航空宇航科学与技术—飞行器设计]