静电激励微板动力学特性研究  

Research on dynamics of electrostatically actuated micro-plate

作　　者：孙丽波[1] 许立忠[2] 刘庆玲[3] 

机构地区：[1]燕山大学环境与化学工程学院河北省应用化学重点实验室,河北秦皇岛066004 [2]燕山大学机械工程学院,河北秦皇岛066004 [3]廊坊师范学院数信学院,河北廊坊065000

出　　处：《振动工程学报》2015年第4期525-530,共6页Journal of Vibration Engineering

基　　金：河北省科学技术研究与发展计划资助项目(13961701D);河北省教育厅科学研究计划资助项目(Z2012031);廊坊师范学院博士基金资助项目(LSBS201306)

摘　　要：基于多物理场动态耦合分析方法建立了考虑微流体压膜阻尼效应的静电激励微板机电耦合系统动力学模型,采用KBM法对微板多物理场耦合动力学响应问题进行了求解。通过静电激励微板动力学实验,采集到了简谐激励下系统响应共振频率、波形图及幅值谱图,图像显示出微板机电耦合系统具有明显的非线性动力学特征。与实验结果对比表明:这种基于多物理场动态耦合分析方法所求得的动力学响应解具有足够的精度。该方法有助于研究静电激励微板的动力学特性并可应用于MEMS动力学设计。The dynamic model of electro statically actuated micro-plate considering squeeze film damping effect of micro fluid is built according to dynamic analysis method of multi-physics coupled.Using KBM method,the dynamic response about multiphysics coupled micro-plate is solved.The resonance frequency,waveforms and amplitude spectrum actuated by harmonic voltage are received by means of dynamics experiment.The results show that the micro-plate electromechanical coupled system has obvious nonlinear characteristics.Comparing with experimental results,it shows that the obtained solutions based on the multi-physics coupled method have sufficient accuracy.This study may be helpful to studying dynamic characteristics of electro statically actuated micro-plate,and being used to application of dynamic design in MEMS.

关 键 词：机械振动 静电激励 机电耦合 微板 MEMS 

分 类 号：TH113.1[机械工程—机械设计及理论] O322[理学—一般力学与力学基础]