一种薄膜石英探针的设计与加工制造方法  

A Design and Fabrication Method of Thin Film Quartz Probe

作　　者：赵飞[1] 王斌[1] 党元兰[1] 

机构地区：[1]中国电子科技集团公司第五十四研究所,河北石家庄050081

出　　处：《无线电工程》2015年第9期37-40,44,共5页Radio Engineering

基　　金：中国电子科技集团公司第五十四研究所工艺基金资助项目(N1224009)

摘　　要：为满足微波电路中低损耗的使用要求,基于石英基板设计了一款Ka频段石英基板微带探针,应用波导来进行能量传输。分析了该款探针作为波导与微带结构转换的电路设计原理及工艺设计方案。在明确设计结构和工艺方案的基础上,通过实现双面精准对位、改善膜层附着力、改善光刻条件和确保切割质量等方面对石英探针的加工制造进行控制。通过对探针实物的测试,测试结果满足使用要求,具有良好的应用前景。In order to meet the requirement of low loss in microwave circuit,a kind of Ka band quartz micro-strip line probe has been designed,which is applied to transfer energy in waveguide.This paper presents the analysis of circuit design theory and fabrication scheme in the transition of waveguide to micro-strip line.Based on the circuit structure and fabrication method,several key problems are solved by controlling double plane alignment, improvement in film adhesion and photolithography condition, ensuring the dieing quality during the fabrication processes.The test results show that the probe can meet the requirements in the circuit ,and has great application foreground.

关 键 词：石英微带探针 仿真 对位 附着力 光刻 切割 

分 类 号：TN451[电子电信—微电子学与固体电子学]